| μBIP Model | Standard Magnification | + Ext 1.5- (E1.5) | +Ext 2.0 (E2.0) | Resolution | Field of View |
|---|---|---|---|---|---|
| μBIP-5 | 7.5x | 11x | 15x | 1.0 µm | 5 mm |
| μBIP-10 | 10 x | 15x | 20 x | 0.6 µm | 1.5 mm |
| Model | Aperture (mm) |
1–195 nm X-ray (c) |
110–225 nm Excimer (G) |
1–410 nm Low Fluence (P) |
10–350 nm Fast, High Fluence (R) |
110–380 nm Slow, High Fluence |
Notes |
|---|---|---|---|---|---|---|---|
| µBIPUVX-7.5x | 7.5 | ✓ | ✓ | ✓ | ✓ | ✓ | Vacuum Comp. 10⁻¹⁰ Torr |
| µBIPUVX-10x | 10 | ✓ | ✓ | ✓ | ✓ | ✓ | |
| µBIPUVX-25x | 25 | ✓ | ✓ | ✓ | ✓ | ✓ | |
| BSF08 | 8 | – | ✓ | ✓ | ✓ | ✓ | Gen. Beam Profiling |
| BSF12 | 12 | – | ✓ | ✓ | ✓ | ✓ | Gen. Beam Profiling |
| BSF23 | 23 | – | ✓ | ✓ | ✓ | ✓ | Gen. Beam Profiling |
| BSF47 | 47 | – | ✓ | ✓ | ✓ | ✓ | Gen. Beam Profiling |
| BSZ47 | 47 | – | ✓ | ✓ | ✓ | ✓ | Gen. Beam Profiling |
| BSZ50 | 50 | – | ✓ | ✓ | ✓ | ✓ | Zoom |
| BSF85 | 85 | – | ✓ | ✓ | ✓ | ✓ | Large Beams |