Nanoindentation Hardness Tester

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Brand：ELIONIX

Model : ELIONIX-5

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Features of ELIONIX-5

5th generation "ENT" series
Achieves high data reproducibility by suppressing interference in the measurement environment
Fully manufactured in Japan, with a user-friendly GUI
Supports a wide range of test loads from 0.5 μN to 2,000 mN

Nanoindentation Testing

Capable of obtaining mechanical properties (e.g., hardness, elastic modulus) for thin films, extreme surfaces, and microscale regions.
Properties can be derived without observing the indentation by analyzing load-displacement curves.
Compliant with ISO 14577-1/JIS Z 2255 standards.

項目	英文說明
負載 / 負載分辨率	High-load unit: 5 μN to 2,000 mN / 5 nN Low-load unit: 0.5 μN to 10 mN / 0.03 nN
載荷加載方式	Electromagnetic force type
測量範圍	±50 μm
測量分辨率	0.3 nm
測量方法	Optical method
樣本量（代表值）	φ50×t3.5mm
可測量面積	X-axis 50 mm, Y-axis 40 mm
最小移動步長	0.1 μm
極速加速製圖	High-load unit: 1 point/sec (typical value) Low-load unit: 3 points/sec (typical value)
映射點數	Up to 10,000 points (100×100 points)
映射間距	Minimum 0.1μm, maximum 200μm
分析值	Indentation hardness (HIT) and indentation modulus (EIT)

▶ Dynamic Test：
By applying minute vibrations to the indenter during testing, the hardness distribution along the indentation depth direction can be continuously obtained.
Samples: Quartz glass (blue), DLC (diamond-like carbon) film (red).
Test results: Regardless of the indentation depth, quartz glass exhibits nearly constant hardness. On the other hand, for the DLC sample, it can be observed that the hardness of the surface DLC film changes constantly due to the influence of the substrate.