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Carrier.L7550.XY | Carrier.L1010.XY | |
|---|---|---|---|
| Standard Version | Atmosphere | ✓ | ✓ |
| .HV, High Vacuum Version | Better than 2E–7 mbar | ✓ | ✓ |
| .UHV, Ultra–high Vacuum Version | Better than 2E–11 mbar | ✓ | ✓ |
| .NM, Non–magnetic Version | Non–magnetic | ✓ | ✓ |
| Category | Item | Model A (Travel 75×50 mm) | Model B (Travel 100×100 mm) |
|---|---|---|---|
| General Information | Outer Dimensions — Home Position | 250 mm × 200 mm × 25 mm | 250 mm × 250 mm × 30 mm |
| Outer Dimensions — Full Travel | 325 mm × 250 mm × 25 mm | 350 mm × 350 mm × 30 mm | |
| Body Material | Standard Version | Al alloy, Stainless steel; 2.1 kg | Al alloy, Stainless steel; 3.5 kg |
| .HV Version | Al alloy, Stainless steel; 2.1 kg | Al alloy, Stainless steel; 3.5 kg | |
| .UHV Version | Al alloy, Stainless steel; 2.1 kg | Al alloy, Stainless steel; 3.5 kg | |
| .NM Version | Al alloy, Ceramic; 1.9 kg | Al alloy, Ceramic; 3.3 kg | |
| Travel Range | X × Y | 75 mm × 50 mm | 100 mm × 100 mm |
| Technical Parameters | Velocity Range (Default) | 0.1 μm/s ~ 10 mm/s | 0.1 μm/s ~ 10 mm/s |
| Velocity Range (.HV & .UHV Versions) | 0.1 μm/s ~ 1 mm/s | 0.1 μm/s ~ 1 mm/s | |
| Max. Driving Force in Motion Direction | 2 N | 2 N | |
| Holding Force | 4 N | 4 N | |
| Max. Load (Horizontal Use) | 4 kg | 4 kg | |
| Minimum Step (Closed-Loop) | 5 nm | 5 nm | |
| Full-Travel Pitch/Yaw | 0.3 mrad | 0.3 mrad | |
| Position Sensor | Resolution | 2 nm | 2 nm |
| Type | Optical position sensor | Optical position sensor |