High-Resolution Ellipsometer

Brand：Photonic Lattice

Model : ME-210

Q'ty :

High-Speed/Planar Distribution
The original PCA (Photonic Crystal Array) sensor enables real-time measurement of moving samples.

High-speed measurement exceeding 1,000 points/minute (ME-110), and over 20,000 points/minute (ME-210, high-resolution mode) can be achieved.

Magnified High-Resolution Measurement
Extended high-resolution measurement can measure film thickness/refractive index within a 50μm square area:

Capable of measuring films on transparent substrates (ME-210-T), including ultra-thin films as thin as 1nm on glass substrates.

Thickness distribution data can be displayed in 3D views.

Line graphs for any selected line and histograms for any region can be generated instantly. Chart data can be exported in CSV format.
Built-in PCA sensor.

Model	ME-210
Measurement Method	PCA (Parallel Processing Method for Photonic Crystal Array) Film Thickness: 0.1nm, Refractive Index: 0.001*
Measurement Repeatability	Thickness: 0.1nm, Refractive Index: 0.001
Light Source	Semiconductor Laser (Typical value: 636nm)
Measurement Spot Size	- Wide Area Mode: 0.55mm square - Mid-Range Mode: 55μm square - High-Quality Mode: 5.5μm square
Angle of Incidence	Standard 70 degrees
Stage Size	Maximum Sample Diameter: 8 inches
Measurement Speed	Maximum >20,000 points/minute (high-resolution measurement)
Product Contents	Complete system software (installation CD), standard samples, instruction manual
Notes	Standard deviation value when measuring one point on a SiO₂ film on Si (approximately 100 nm thick) 100 times. Specifications are subject to change without prior notice.

Model : SE-101